RF Semiconductor Foundry
Integrated Passive Device (IPD)
Process Summary
MMIC passive technology designed for compact size and low-cost manufacturing, enabling reduced component count for improved front-end module integration. It is ideal for low-pass filters and off-chip matching networks, and meets or exceeds environmental requirements. It also features large through-wafer via openings to support coplanar heterogeneous integration.
Applications
- Off-Chip Matching Elements/Power combiners
- Bandpass Filters (low & high-band) for Cell Phone PA
- Minimize Parasitic and Interconnects for High-Frequency Module Integration of Different Chips
Process Features
- Thin-Film Resistor
- MIM Capacitor
- Thick Metal for High-Q, Compact Spiral Inductors
- Air-bridge or Polyimide Interconnect Options
- Passive Integrated Circuits
Low Pass Filter
Simulation ResultsTypical Parametric Data
| MIM Capacitance | Q |
| 0.5 pF | 240 |
| 1.0 pF | 370 |
| 2.4 pF | 520 |
| Spiral Inductor | Q |
| 14 nH* | >18 |
